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Overview:
- Manufactured NEW in 1996;
- Original purchase price: $1.8M;
- 150mm main frame with 100mm indexing option kit; can run either wafer size;
- Load lock wafer transfer chamber;
- Dual Cassette Indexer;
- Available for inspection in fab;
- PLIS Panel, L Tech Injectors;
- Remote PC Control with spare PC;
Description:
The Applied Materials P5000 front panel has an Emergency Power Off mushroom switch, with a front control panel for Start, Stop, Load and Unload. The chamber door is a load lock wafer transfer chamber with a dual cassette indexer, currently set up to accommodate 150mm wafers. The spare parts include a new 100mm chamber and existing 100mm wafer transfer loading system. System gas panel is steel reinforced safety glass and designed for Argon (AR), Freon 14, Oxygen, Freon and Helium. Panel measures 28 »w X 38 »hx 10 »d. Options include Olin Mfg TEOS gas cabinet, Model 25 with dual bottles and dual scales ; 115vac 50/60Hx operation. System options also include external chiller.
Configuration:
| Chamber A: | CVD TEOS ; MKS Baratron Transduce Type 122B, RF Matching network 13.56 Mhz, dual chiller lines. |
| Chamber B: | CVD TEOS ; MKS Baratron Transduce Type 122B, RF Matching network 13.56 Mhz, dual chiller lines. Photo of open chamber with shower head to demonstrate tool condition available. |
| Chamber C: | Etch with lamp heated Oxygen ; MKS Baratron Transduce Type 127, RF Matching network 13.56 Mhz ; AMAT etch throttle valve with Leybold Magnet pump ; Chamber is insulated and has both side and top view ports; |
| Chamber D: | Etch with lamp heated Oxygen ; MKS Baratron Transduce Type 127, RF Matching network 13.56 Mhz ; AMAT etch throttle valve with Leybold Magnet pump ; Chamber is insulated and has both side and top view ports; |
| VINTAGE: | Manufactured in 1996 |
| CONDITION: | Good Condition with many extra spare parts (please see following pages); Available for full inspection. |
Spare Parts (New in Original Packaging):
- Air actuated valve, 6RA, NC, ¼ VCR, FF 1/8;
- Leybold Turbo pump Model 381C;
- Spring loaded connector part number 0050-25013;
- Pneumatic valve;
- Pressure switch;
- TC Isolation amplifier;
- Pneumatic lines;
- Manual valves;
- Fan;
- IG Valve
- Chamber platens, 3-4 with frames, (do not appear new);
- Braided stainless steel lines;
- Proteus fluid flow switch;
- MFC's;
- Hedland Flow Alert Flow Meter with electrical signal;
- Load lock door gate valve;
- Solid state relay;
- 4" conversion kit chamber;
Spare Parts (Not New):
- 4 Each RF Power Supplies, ENI Model OEM 12A (one is Model OEM 12 a XL), 13..56 Mhz;
- AC Box Interface Control Cabinet;
- 4" conversion kit;
Photos:
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