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AMAT PARTS (Available in single Lot only)
This lot of items consists of both brand new parts and parts that are not used, but cleaned with DI water
| Item # |
Part # |
Description |
Qty. in Lot |
| 1 |
--------- |
Chamber Assembly |
1 |
| 2 |
3870-01034 |
Needle Valve |
1 |
| 3 |
3400-01127 |
Flexible Tube |
2 |
| 4 |
0150-76286 |
Heater Power Cable |
1 |
| 5 |
0600-01014 |
Fan |
1 |
| 6 |
0140-21013 |
Cable |
1 |
| 7 |
0190-09419 |
Heater Driver |
1 |
| 8 |
0010-09305 |
Throttle Valve |
1 |
| 9 |
0050-25242 |
Foreline Manifold |
1 |
| 10 |
3310-01081 |
Ion Gauge |
1 |
| 11 |
3300-02240 |
FTG |
2 |
| 14 |
3400-01057 |
Water hose to Chamber lid |
1 |
| 16 |
3030-01413 |
MFC (gold) AR 500 SCCM |
2 |
| 17 |
3870-01306 |
Pneumatic Valve |
5 |
| 18 |
3870-01307 |
Manual Shut Off Valve |
1 |
| 19 |
3870-01695 |
Air Actuated Valve |
1 |
| 20 |
3870-01805 |
KF25 Manual valve |
1 |
| 21 |
0150-20736 |
Pressure gauge |
1 |
| 22 |
3310-01090 |
Pressure switch |
1 |
| 23 |
0010-36417 |
Heater |
1 |
| 24 |
0200-09995 |
Ring inner |
1 |
| 25 |
0200-09997 |
Ring inner |
1 |
| 26 |
0020-01049 |
Shield Cap |
1 |
| 27 |
0190-09372 |
TC |
1 |
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