• Veeco VE400 Evaporator in custom frame
• Varian 4" diffusion pump
• Welch 1397 Mechanical pump
• Right angle hi-vac valve
• 18" X 12" Pyrex bell jar
• Aluminum collar and lid
• 8 each 2 ¾" conflate flanges
• Liquid Nitrogen Coldfinger style trap
• Motorized hoist
• Previously used for gold evaporation
• Manual valves

• Automatic Plasma Etcher;
• Microprocessor based plasma chemistry etcher;
• Designed especially for the etching of silicon dioxide thin film deposited on single crystal or polysilicon semiconductor wafers;
• Provides up to four process gasses;
• Provides up to two process channels and a clean channel;
• Includes RF generator;
• Digital Control System;

Frame- 48" W X 34" D footprint
25" O ring seal, stainless steel bell jar with two viewports.
CTI 8 Cryopump.
CTI compressor.
CTI temperature monitor.
Pneumatic stainless steel gate valve
SS pneumatic roughing, regeneration and associated manifolding.
5KVA SCR control panel with manual Maxtek switch and digital current readout.
HD 600V 3 boat tap switch.
HSD valve sequencer/auto cryogenic regeneration.
Granville Phillips 340 Ion/convectron Gauge.
Maxtek MDC 360 film thickness controller with remote control.
Maxtek dual crystal head.
Sites for three typical configuration thermal evaporation boats with source shutter
Single 6" substrate H2O cooled static stage (height, angle and offset adjustable) with shielded thermocouple temperature indication.
Quartz Halogen substrate heater with digital temperature controller.
Leybold D30 mechanical pump.
Manuals and schematics binder detailing equipment. (as available).

Statement of Work:

1. Shielding will be professionally chemically cleaned.
2. All mechanical assemblies and sub-assemblies will be inspected for damage or wear, and repaired or replaced as necessary.
4. All existing electrical wiring will be inspected and replaced as necessary in system chassis.
5. System will be Helium Mass Spectrometer leak tested.
6. Full functional test of system performance for a period of 3 days prior to customer inspection.
7. Customer can receive system operation and maintenance training at vendor facility during final inspection at no additional cost to customer.

Warranty: All OEM warranties are in passed on to customer. 6 months parts and labor on vacuum system and electronic devices. T.E.C. must receive timely notification of system malfunction, and be provided the opportunity to evaluate system prior to any repair attempts by the customer.

Delivery: 7-10 weeks from receipt of hard copy purchase order and down payment. Functional testing, acceptance sign-off and delivery may be subject to change without penalty to vendor in the event of delays in receiving OEM components.

NOTE: Vendor agrees to notify customer immediately, in the event of any delay due to equipment availability from its suppliers.

Shipping: FOB Northern California

• 4 target sputtering system
• Load Lock chamber
• Cryo pumped, C2C
• Sputter down configuration
• 4 each RF Matching units
• 4 each RF Cathodes
• 4 each 200mm cathodes
• RFPP RF Generator for targets
• 2 each RFPP Power supplies
• Substrate Heat Option Included
• 3 Process gasses: Argon: 200 SCCM; N2 20 SCCM; O2 20 SCCM
• CTI CT-8 Cryo pump with CTI 8200 Compressor
• Edwards vacuum pump
• SPECTRA Vascan Plus RGA, Digital - Excellent condition with Balzers turbo pump and controller included
• Eurotherm Substrate Temperature Control
• Balzers TPH-340 Turbo Pump Load Lock

• 200mm round backing plate(s): Cu
• 200mm round cathodes
• More in boxes to be opened

• High sputtering rates
• Low substrate temperature during sputtering
• Excellent layer thickness uniformity resulting from variable cathode to substrate spacing and symmetrical arrangement of the sputtering chamber
• High throughput: 10 substrates, 3” dia
• Processes
  • RF-etching
  • RF-sputtering
  • RF-bias-sputtering
• Sputtering chamber is easily accessible
• Microprocessor controlled
• Turbo pumped